Surface cleaning device such as substrate or the sheet which internalizes compressed control mechanism and gap control mechanism and these compressed control mechanisms and the gap control mechanism in surface cleaning device such as substrate or sheet

摘要

PROBLEM TO BE SOLVED: To speedily and surely remove dust and particulates adhered to the surface of a substrate or a sheet without inflicting damages to the substrate or the sheet regardless of the amount of consumption of adhesive tape rolls and the thickness and the materials of the substrate or the sheet.;SOLUTION: Top and bottom adhesive rubber rolls (3) and (3'), while rotating with respect to the front and the back surfaces of a substrate or a sheet (6), closely hold the surfaces therebetween to absorb and to remove dust and particulates (7) adhered to the surfaces. Adhesive tape rolls (5) and (5') are abutted on the surfaces of the rolls (3) and (3') to reabsorb and to remove the dust and particulate (7) on the surfaces. The pressure of the rolls (3) and (3') which closely hold the surfaces of the front and the back of the substrate or the sheet (6) is automatically increased or decreased in accordance with the changes in a gap (L) of the rolls (3) and (3') and the amount of consumption of the rolls (5) and (5') and is maintained constant. Thus, even though the adhesive tape is consumed and the substrates or the sheets having different thicknesses and materials exist in a mixed manner on a production line, no damage is inflicted to the substrates or the sheets and dust and particulates adhered to the surfaces are speedily and surely removed.;COPYRIGHT: (C)2002,JPO