A method of manufacturing a field emission type cold cathode

摘要

PROBLEM TO BE SOLVED: To provide a method for manufacturing field emission type cold cathodes with a large surface area, excellent evenness of field emission and reproducibility, and high field emission efficiency at high mass productivity. ;SOLUTION: A field emission type sharp cold cathode 18 with a large surface area is manufactured by following processes: forming a hole 12b in a metal substrate 11, forming a sharp recessed part 12 by narrowing the inner face of the hole 12b by oxidation or coating, filling the inside of the recessed part 12 with an emitter material layer 14, joining the emitter material layer 14 with a supporting substrate 17, and separating the metal substrate 11 from the emitter material layer 14.;COPYRIGHT: (C)1999,JPO