Casting the high purity oxygen free copper

摘要

(57) Abstract Although the sputtering target is made, method and the device in order to make copper casting ones which the usefulness, with high purity to be desirable is not the substantial sky cave with lack of oxygen and do not have either content ones are offered. The crucible to which this method, the coil induction furnace (11) using, had the reducing gas and the insulator and is covered (17) it possesses the process which melts the high purity copper in inside. It is located between the coil of the furnace and the furnace and the crucible which accommodates the melted copper the cooling jacket (23) is positioned with the upper part, the crucible being passed to the lower part continually opening of the cooling jacket (27) through, cools the lower part of the crucible. The upper part part of the pot which inside the coil rides is heated, in order to maintain the layer of the melted copper on the copper which has been solidified inside the lower part, low heat is maintained inside the furnace.