METHOD OF DRESSING ABRASIVE CLOTH FOR DOUBLE-SIDED POLISHER AND DRESSING JIG THEREFOR

摘要

PROBLEM TO BE SOLVED: To provide a method of dressing abrasive cloth for a double-sided polisher, capable of applying each optimum amount of dressing to two abrasive cloths of different materials, and provide a dressing jig therefor.;SOLUTION: The dressing amount of a hard urethane foam pad 14 by a sintered body 52 on the top surface of a jig substrate 51 is made different from that of a soft non-woven cloth pad 15 by a brush 53 on the bottom surface of the jig substrate 51. This dressing jig 50 is dressed by being positioned between an upper surface table 12 and a lower surface table 13 and moved between the upper surface table 12 and the lower surface table 13 on a plane parallel with the surface. Thus, each optimum amount of dressing can be applied to the two pads 14, 15 of different materials, incorporated into the double-sided polisher 10.;COPYRIGHT: (C)2003,JPO