Alternating current high voltage power supply device null for discharge plasma generation

摘要

PROBLEM TO BE SOLVED: To reduce a large reactive power which is generated by the application of a high frequency voltage to a reactor and reduce the scale of a discharge plasma generating AC high voltage power supply apparatus. SOLUTION: A discharge plasma generating AC high voltage power supply apparatus consists of a circuit which receives the input of a commercial AC power supply 10 and generates a DC voltage by a rectifier 11 and a smoothing capacitor 12 and converts the DC voltage into an AC voltage with a required frequency by a high frequency inverter 13 and a circuit composed of the series connection of a reactor 30 which is a load and an inductor 20 consisting of a coil. If an AC voltage with the resonance frequency of the series resonance circuit composed of the reactor 30 and the inductor 20, a reactive power is not supplied to the series resonance circuit and, on the other hand, a high voltage which is Q (Q-value) times the output voltage of the high frequency inverter 13 is applied to the reactor 30. With this constitution, the capacity of the power supply apparatus of the reactor 30 can be reduced and the scale of the power supply apparatus can be reduced.