CASSETTE FOR IMMERSION PROCESSOR, IMMERSION PROCESSOR, IMMERSION PROCESSING METHOD, MANUFACTURING METHOD FOR ELECTRO-OPTICAL DEVICE AND ELECTRONIC APPLIANCE

摘要

PROBLEM TO BE SOLVED: To provide a cassette for an immersion processor not generating drying irregularities on a substrate in an immersion processing, the immersion processor and an immersion processing method.;SOLUTION: For the cassette 200 for the immersion processor, planar works such as the substrates for instance are held at intervals with each other on a holding part. The planar work is the object of the immersion processing, and the immersion processing is executed by feeding the planar work together with the cassette into a processing tank containing a processing liquid and then pulling it up. In this case, since fine irregularities are formed on the surface for the cassette, when feeding the cassette into the processing liquid and when puling it up from the processing liquid, the vibration of a liquid surface accompanying the movement of the surface of the cassette is suppressed. As a result, the uneven deposition of the processing liquid on the surface of the planar work after being pulled up are suppressed.;COPYRIGHT: (C)2003,JPO