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CIRCULATOR, ISOLATOR, PLASMA PROCESSING APPARATUS AND PROCESSING METHOD USING THE SAME, SWITCHING MACHINE FOR MICROWAVE WAVEGUIDE AND MICROWAVE PROCESSING APPARATUS
CIRCULATOR, ISOLATOR, PLASMA PROCESSING APPARATUS AND PROCESSING METHOD USING THE SAME, SWITCHING MACHINE FOR MICROWAVE WAVEGUIDE AND MICROWAVE PROCESSING APPARATUS
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机译:循环器,隔离器,等离子体处理装置以及使用该装置的处理方法,微波波导切换机和微波处理装置
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摘要
PROBLEM TO BE SOLVED: To enable switching for changing the direction of a DC magnetic field, as required and reversing the direction of a current generated in central conductors crossing with each other.;SOLUTION: A circulator applies a DC magnetic field to a waveguide 1 being the central conductor consisting of a plurality of parts arranged so as to cross with each other on the same plane, from a direction perpendicular to the plane, including the waveguide 1. The circulator has two pairs of permanent magnets 4, 5 each provided on a magnet case 3 for performing an operation 6 for the waveguide 1 and having reverse magnetic field directions each other, as a magnetic direction reversal means for reversing the direction of the DC magnetic field to reverse the direction of a current generated in the central conductors which cross with each other.;COPYRIGHT: (C)2003,JPO
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