SOFT MAGNETIC THIN FILM FOR MAGNETIC CORE WITH HIGH SATURATION MAGNETIZATION

摘要

PROBLEM TO BE SOLVED: To provide a soft magnetic film which is suitable for a magnetic recording head magnetic core material and has Bs of 2.2 T or above at a room temperature and frequency dependency of superior permeability.;SOLUTION: This magnetic core soft magnetic thin film has a composition represented by a formula, (Fe_1-ACoA)_100-X_-Y_-ZMXRYOZ, where M is Zr and/or Al, R denotes one or two elements selected from Ru, Pd, and Pt, O represents oxygen, compositional ratios A, X, Y and Z denote atomic ratios, and A, X, Y and Z are so set as to satisfy following formulas, 0.25≤A≤0.5, 1≤X≤3, 0≤Y≤1, and 6≤Z≤10. The soft magnetic thin film is formed of fine crystals where the (110) planes of body-centered cubic structures are preferentially oriented and which are 40 nm or below in grain diameters and has a saturation magnetization of 2.2 T or above.;COPYRIGHT: (C)2003,JPO