Measuring device and method for measuring the lamellar microstructure with low interference light interference measurement method

摘要

PROBLEM TO BE SOLVED: To obtain precise observed data even with reference to a sample whose surface is not uniform and not smooth such as a skin, to track the change with the passage of time, in the layered fine structure of the sample, and to analyze the layered fine structure three-dimensionally in an optical coherence microscopic(OCM) measurement. ;SOLUTION: In the measuring apparatus 1 by a low-interference light interference measuring method, the tip part of a probe 5 by which low-coherence light is made incident on a sample S is constituted of a core 3X-shaped optical fiber 3 without an armor 3Y, and the close contact property of the probe 5 with the sample S is enhanced. In addition, a sample base 41 which can be moved to the z-axis direction is installed at the measuring apparatus 1, and the probe 5 is attached to an arm 42 which can be moved to the x-axis direction, the y-axis direction and the z-axis direction. It is preferable that an imaging device 20 which images the enlarged image of a measuring part is integrated with the probe 5.;COPYRIGHT: (C)1998,JPO