RESISTIVITY MEASURING METHOD BY FOUR PROBE METHOD AND ITS DEVICE

摘要

PROBLEM TO BE SOLVED: To provide a resistivity measuring method by a four probe method and its device, suitable for measuring the resistivity of a measuring object such as a silicon ingot.;SOLUTION: In this resistivity measuring method by the four probe method and this device, four probes are pressurized and brought into contact with the measuring object fixed on an insulator, and a current flowing in the measuring object and a voltage drop portion caused by a resistance of the measuring object are measured respectively, and the resistivity is calculated based on the measured values. In the method and the device, the pressure contact of the measuring object with the fixed four probes is detected as a trigger signal, and the detected trigger signal is inputted into a computer, and thereby the current flowing in the measuring object and the voltage drop portion caused by the resistance of the measuring object are taken simultaneously and instantly after a fixed time and operated, and the resistivity of the measuring object is calculated. Hereby, an influence to stability of an output current from a power source, an influence of a disturbance noise, an induced noise from a human body as a disturbance noise or the like can be removed. The measuring object can be grasped and measured, and the work efficiency at the measuring time can be improved.;COPYRIGHT: (C)2003,JPO