TRANSPARENT CONDUCTIVE FILM LAMINATED BODY AND ITS MANUFACTURING METHOD, AND ARTICLE USING TRANSPARENT CONDUCTIVE FILM LAMINATED BODY

摘要

PPROBLEM TO BE SOLVED: To provide a method of manufacturing a transparent conductive film with high transparency, high conductivity, high adherence to a substrate, with high productivity and a low environmental load, and to provide a transparent conductive film laminated body manufactured by this method, and an article using the transparent conductive film laminated body. PSOLUTION: This transparent conductive film laminated body formed by laminating a primer layer, a gas barrier layer, and a transparent electrode layer on a transparent substrate is manufactured in such a way that under atmospheric pressure or the pressure near to the atmospheric pressure, at least one kind of inert gas, at least one kind of organic metal compound, and mixed gas comprising at least one kind of reactive gas are introduced into a discharge space, the space is made in a plasma state, and the transparent substrate is exposed to the plasma to independently form the primer layer, the gas barrier layer, and the transparent electrode layer in this order on the transparent substrate. PCOPYRIGHT: (C)2004,JPO