PURPOSE: To secure a certain processing accuracy by forming the low magnification observed image of a specimen including the whole processing region as a reference image, and relating the point of origin to one address on the specimen. ;CONSTITUTION: A lens system 3 extracts ions from an ion source 2 of a beam scanning device 1 and produces a beam 4. The irradiated position of a specimen 6 with the beam 6 is deflected by a deflection system 5. When beam is cast on the specimen 6, secondary electrons are emitted from the surface of the specimen 6, and they are captured by a sensor 8 and converted into a digital signal. When signal is fed from a control device 20, the beam is deflected to the point on sqecimen 6 corresponding to the fed signal. The signal specifies the address of the point. A stage 7 is equipped with a reference mark, and dislocation of the reference point is sensed by casting the beam 4 onto the reference mark. A scanning circuit 21 emits signals for putting the beam into raster scan and specifies the address corresponding to each picture element on the display screen.;COPYRIGHT: (C)1995,JPO
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