Diamond backing material and surface acoustic wave component

摘要

PURPOSE: To provide a diamond base material large in electromechanical coupling factor and capable of being suitably used for the surface acoustic wave(SAW) element of a wide band. ;CONSTITUTION: An intermediate layer 2 having a crystalizing characteristic control function is arranged on diamond 1, and an LiNbO₃ layer 3 is arranged on the intermediate layer. Thus, the diamond base material large in the electromechanical coupling factor and capable of being suitably used for the SAW element of the wide band can be obtained.;COPYRIGHT: (C)1996,JPO