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RADIATION SENSITIVE COMPOSITION WITH VARIABLE DIELECTRIC CONSTANT AND METHOD FOR VARYING DIELECTRIC CONSTANT
RADIATION SENSITIVE COMPOSITION WITH VARIABLE DIELECTRIC CONSTANT AND METHOD FOR VARYING DIELECTRIC CONSTANT
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机译:可变介电常数的辐射敏感成分及改变介电常数的方法
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摘要
PROBLEM TO BE SOLVED: To provide such a radiation sensitive composition with a variable dielectric constant that the dielectric constant of the material can be varied by an easy method, the difference in the varied dielectric constant is sufficiently large, and a stable dielectric pattern or an optical material can be obtained without depending on the use conditions in the succeeding process. SOLUTION: The radiation sensitive composition with a variable dielectric constant contains (A) a decomposable polymer, (B) a non-decomposable polymer, (C) a radiation sensitive decomposing agent and (D) a stabilizer.
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