MANUFACTURING METHOD FOR ASPHERICAL LENS MOLD, ASPHERICAL LENS ARRAY MOLD MANUFACTURED THEREBY, AND ASPHERICAL LENS ARRAY

摘要

PROBLEM TO BE SOLVED: To provide a manufacturing method for an aspherical lens mold, an aspherical lens array mold manufactured thereby, and an aspherical lens array.;SOLUTION: As shown by (a), a layer 2 having an etching speed higher than that of a quartz glass substrate 1 is formed and a mask 3 having a circular opening is formed. The layer 2 is etched using a fluoric acid aqueous solution and, after etching advances up to the quartz glass substrate 1, etching anisotropic with respect to the layer 2 advances in the quartz glass substrate 1 as shown by (c). The mask 3 is removed and etching is again performed until at least the layer 2 is perfectly removed to form a recessed part 1A having an aspherical, shape in the quartz glass substrate 1 as shown by (e). This etched quartz glass substrate 1 is used as the aspherical lens mold.;COPYRIGHT: (C)2003,JPO