PROBLEM TO BE SOLVED: To efficiently conduct position alignment for bonding two substrates in manufacturing a liquid-crystal display panel or the like.;SOLUTION: On glass substrates 8U, 8D to be overlaid, two pairs of marks on each (8U1, 8U2, and 8D1, 8D2) are formed, wherein marks (8U1, 8U2) on one of the substrates are colored red. When the image patterns of marks (8U2, 8D2) consisting of one for each substrate are overlapped, the lamp is changed over to a red lamp 94b so that the colored (red) background display is obtained. Consequently, only the image patterns of the uncolored marks (8D1, 8D2) are exclusively recognized. By computing difference between the image patterns exclusively recognized and the image patterns in which the marks consisting of one for each substrate are overlapped, the image patterns of the colored side (8U1, 8U2) only are exclusively extracted. Since the mark positions of each substrate are separately extracted in this way, enhancement of the substrate bonding-work efficiency is realized.;COPYRIGHT: (C)2003,JPO
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