CONNECTION STRUCTURE OF ELECTRODE BAR FOR FEED AND TERMINAL FOR FEED, HEATER ELEMENT, HEATING DEVICE, AND SUBSTRATE HEATING DEVICE

摘要

PROBLEM TO BE SOLVED: To provide a connection structure in which breakage of a connecting portion of an electrode bar for feed and a terminal for feed can be prevented, and an outstanding durability is obtained.;SOLUTION: The connection structure of the electrode bar for feed and the terminal for feed is so constituted that the electrode bar 4 for feed made from a conductive silicon carbide sintered body, of which one end is connected to a heating element, and the terminal 7 for feed is fixed by a mechanical fixing means 25 to the other end 4b of the above electrode bar 4 for feed, and further a covering layer 40 is formed on a contact surface 7d of the above terminal 7 for feed at the other end 4b of the above electrode 4 for feed.;COPYRIGHT: (C)2004,JPO