COATING APPARATUS, CLEANING APPARATUS FOR COATING APPARATUS, CLEANING SYSTEM FOR COATING APPARATUS AND CLEANING METHOD OF COATING APPARATUS

摘要

PROBLEM TO BE SOLVED: To provide a coating apparatus, a cleaning apparatus for the coating apparatus, a cleaning system for the coating apparatus and a cleaning method of the coating apparatus in which cleaning is carried out without providing a special equipment for operators or utilities in the surroundings and the cleaning work is simplified.;SOLUTION: A cleaning liquid spray means 5b inserted and pulled out to and from a manifold 1a along the axial direction of the manifold 1a and for spraying a cleaning liquid 30 toward a wall surface forming the manifold 1a is provided to clean the manifold 1a and a slit in an applicator nozzle 1 of the coating apparatus for forming a coating layer on a sheet-like material by making the curtain film-like coating liquid to flow down on the traveling sheet-like material.;COPYRIGHT: (C)2003,JPO