OPTICAL TEST SYSTEM INCLUDING INTERFEROMETER WITH MICROMIRROR AND PIEZOELECTRIC TRANSLATOR FOR CONTROLLING TEST PATH MIRROR

摘要

PPROBLEM TO BE SOLVED: To provide an adjustable optical system that determines aberration in a source beam by comparing a test beam with a reference beam. PSOLUTION: This optical system includes a test source for producing the source beam having a spatial intensity distribution including an aberration component, a wavefront analyzer for processing a fringe signal associated with the aberration component, and an interferometer interposed between the test source and wavefront analyzer. The interferometer includes a beamsplitter for splitting the source beam into the test beam and reference beam, a mirror disposed in the test beam path, and a micromirror disposed in the interference beam path. The micromirror reflects a central position of the ference beam toward an imaging device and allows an outer portion of the reference beam to pass thereby. Therefore, this optical system is not affected by the aberration existing in the source beam. PCOPYRIGHT: (C)2003,JPO