MANUFACTURING METHOD FOR SUBSTRATE WITH RECESSED PART FOR MICROLENS, SUBSTRATE WITH RECESSED PART FOR MICROLENS, MICROLENS SUBSTRATE, OPPOSED SUBSTRATE FOR LIQUID CRYSTAL PANEL, LIQUID CRYSTAL PANEL AND PROJECTION TYPE DISPLAY DEVICE

摘要

PROBLEM TO BE SOLVED: To provide a manufacturing method for a substrate with a recessed part for a microlens coping with an aspherical lens.;SOLUTION: The substrate with the recessed part for the microlens is manufactured through a process of forming a first mask layer 6 on the surface of a glass substrate 5, a process of forming a first opening 61 on the first mask layer 6, a process of forming a first recessed part 31 on the glass substrate 5 by wet etching, a process of removing the first mask layer 6, a process of forming a second mask layer 63 on the surface of the glass substrate 5, a process of forming a third opening 631 on the second mask layer 63, a process of forming the recessed part on the glass substrate 5 by wet etching, and a process of removing the second mask layer 63.;COPYRIGHT: (C)2004,JPO