SAMPLING PROBE FOR COLLECTING DROPLET AND METHOD AND APPARATUS FOR MEASURING DISTRIBUTION OF GRAIN SIZE OF ATOMIZED DROPLET

摘要

PROBLEM TO BE SOLVED: To highly accurately measure the distribution of droplet diameters by preventing the distribution of droplet size from temporally varying due to the insufficient drying of droplets, the deposition of the droplets to device walls, and adhesion of the droplets to each other during a drying process.;SOLUTION: When a flow of dry and clean air is made to flow as a high- speed air flow through an air flow supply tube 8, the atomized droplets are sucked from an collecting opening (a) of a droplet collecting tube 7, and the sucked and atomized droplets are simultaneously dried at a droplet drying opening (b) of the droplet collecting tube open in the air flow supply tube 8.;COPYRIGHT: (C)2003,JPO