DISCHARGE PLASMA TREATMENT APPARATUS AND DISCHARGE PLASMA TREATMENT METHOD USING THE SAME

摘要

PROBLEM TO BE SOLVED: To provide a discharge plasma treatment apparatus in which both surfaces of a base material to be treated are stably treated with discharge plasma without bringing into contact with an electrode and which has roll - roll electrodes and a discharge plasma treatment method using the same.;SOLUTION: In the apparatus for treating both surfaces of the base material to be treated which is transported between the electrodes with glow discharge plasma produced by applying electric field between a pair of the roll electrodes each covered with a solid dielectric and introducing a treating gas between the electrodes, rings for holding both ends of the base material to be treated are provided in the vicinity of both ends of the roll electrodes and the base material to be treated is treated while being transported by rotating the electrodes.;COPYRIGHT: (C)2003,JPO