METHOD FOR FIXING MATERIAL WITH LARGE THERMAL EXPANSION COEFFICIENT BY MATERIAL WITH LOW THERMAL EXPANSION COEFFICIENT

摘要

PROBLEM TO BE SOLVED: To provide a new method for preventing the damage to an outer material with small thermal expansion coefficient by the difference in the thermal expansion coefficients between the both when fixing a material with a large thermal expansion coefficient by clamping it by the material with the small thermal expansion coefficient.;SOLUTION: A heat insulating fixing base M, which is formed of the material with the small thermal expansion coefficient and has a projecting clamp fixing part 2 for clamping the support object P, is used as means for clamping a support object P, or the material with the large thermal expansion coefficient. The expansion force of the support object P based on the temperature rising is relieve by forming a warp in the projecting clamp fixing part 2.;COPYRIGHT: (C)2003,JPO