QUARTZ OSCILLATOR TYPE FILM THICKNESS MONITOR AND QUARTZ OSCILLATOR

摘要

PROBLEM TO BE SOLVED: To provide a quartz oscillator type film thickness monitor and a quartz oscillator for avoiding the influence of spurious waveform by specifying a Z axis that the resonance oscillation of the quartz oscillator generates and for extending the working life of the quartz oscillator.;SOLUTION: In the quartz oscillator film thickness monitor 5, the quarts oscillator type film thickness monitor and the quartz oscillator are composed by continuously arranging a plurality of quartz holders 2 where the quartz oscillator 1 is fitted, and a deposition state is controlled by detecting the tendency of the vibration frequency in the quartz oscillator 1. In the monitor 5, the Z-axis direction of each of the quartz oscillator 1 is specified for arrangement, and the influence of the spurious waveform is avoided by specifying the Z axis for generating the main resonance of the quartz oscillator 1, thus extending the working life of the quartz oscillator 1.;COPYRIGHT: (C)2004,JPO