DISCHARGE PLASMA TREATMENT APPARATUS AND DISCHARGE PLASMA TREATMENT METHOD USING THE SAME

摘要

PROBLEM TO BE SOLVED: To provide a discharge plasma treatment apparatus having roll electrodes which can stably treat a long substrate to be treated with discharge plasma, and a discharge treatment method using the apparatus.;SOLUTION: The discharge plasma treatment apparatus treats the substrate with glow discharge plasma generated by applying an electric field between a pair of the roll electrodes where at least one of the opposite surfaces of the electrodes is coated with a solid dielectric material. Process gas is introduced between the roll electrodes while rotating them, and the substrate is set between the electrodes to be treated. The discharge plasma treatment method uses the discharge plasma treatment apparatus.;COPYRIGHT: (C)2003,JPO