ENERGY DISPERSION TYPE MICROANALYZER

摘要

PROBLEM TO BE SOLVED: To provide an energy dispersion type microanalyzer enabling anyone to simply set an analyzing condition optimum to a sample even if he has no exclusive knowledge or ability and capable of obtaining a highly accurate analyzing result in spite of simple handling.;SOLUTION: In the energy dispersion type microanalyzer equipped with an electron microscope 11, an energy dispersion type X-ray analyzer 22 and computers 13 and 24 for controlling them, memory media 13a and 24a storing the analyzing condition set with respect to the electron microscope 11 and the analyzing condition set with respect to the energy dispersion type X-ray analyzer 22 on the basis of the condition corresponding to the set analyzing condition are provided.;COPYRIGHT: (C)2003,JPO