PIEZOELECTRIC SINGLE CRYSTAL MATERIAL AND PIEZOELECTRIC DEVICE USING PIEZOELECTRIC SINGLE CRYSTAL MATERIAL

摘要

PROBLEM TO BE SOLVED: To provide a piezoelectric single crystal material in which the temperature dependency of piezoelectric property in a direction desired for device is improved, and a piezoelectric device using the piezoelectric single crystal material. ;SOLUTION: The piezoelectric single crystal material has a Ca₃Ga₂Ge₄O₁₄ structure, of which main ingredients comprise La, Sr, Ta, Ga and Si, and which is expressed by a composition formula La_3-xSr_xTa_yGa_6-y-zSi_zO₁₄ (wherein 0x3, 0y1, 0z2).;COPYRIGHT: (C)2003,JPO