MECHANICAL AND ELECTRICAL INTEGRATION TYPE AUTOMATIC INSPECTION SYSTEM FOR ANGULAR MOTION DETECTOR

摘要

PROBLEM TO BE SOLVED: To provide an improved inspection system for a small angular motion detector. ;SOLUTION: The mechanical and electrical integration type automatic inspection system for an angular motion detector is provided with a fixing instrument 42 for inspection for holding the angular motion detector 44 inspected mechanically and electrically, a carriage subsystem for supplying the fixing instrument 42 for inspection with the angular motion detector 44, a motor having a rotation shaft 40 attached to the fixing instrument 42 for inspection for rotating the fixing instrument 42 for inspection and the angular motion detector 44 held by the fixing instrument 42 for inspection, and an electric tester for inspecting the angular motion detector 44 when the angular motion detector 44 rotates. The angular motion detector 44 inspected by the system of this invention is, for example, a micro-machine type integrated circuit gyroscope chip.;COPYRIGHT: (C)2003,JPO