LAMINATED STRUCTURE TYPE PHOTOBLEACHING WAVEGUIDE AND ITS MANUFACTURING METHOD

摘要

PROBLEM TO BE SOLVED: To provide a laminated structure type photobleaching waveguide, with which a high-precision waveguide can be easily obtained at a low cost and its manufacturing method. ;SOLUTION: Core layers 3a-1 to 3a-6, and 3b-1 to 3b-6 and respective flank clad layers 4a and 4b are made of polymer materials for photobleaching, so all the core layers 3a-1 to 3a-6 and 3b-1 to 3b-6, and all the flank clad layers 4a and 4b can be formed together only by performing exposure by ultraviolet- ray irradiation through a photomask once. Consequently, the waveguide can easily be formed at a low cost. Further, those core layers 3a-1 to 3a-6, and 3b-1 to 3b-6, and flank clad layers 4a and 4b can be formed through single-time batch exposure, so those core layers 3a-1 to 3a-6 and 3b-1 to 3b-6, and flank clad layers 4a and 4b can be formed while their position precision and size precision are maintained with high precision.;COPYRIGHT: (C)2003,JPO