QUENCHING OF PHASE-MATCHED SURFACE WAVES (SUBSTRATE MODES) IN LINBO3 MODULATORS

摘要

Selective removal of materials from the substrate of an integrated electro-optical device prevents coupling to substrate modes. The selective removal may be accomplished by laser ablation, mechanical removal such as grinding, chemical etching agents, or combinations thereof. The strength of the substrate is maintained by not removing materials from areas where removal is not needed.