Electrification quantity measurement apparatus, electrification quantity measurement method, static electricity discharge detection apparatus, and static electricity discharge detection method

摘要

In an electrification quantity measurement apparatus including a probe for coming in contact with a measurement subject, a first resistor connected at a first terminal thereof to the probe, and a capacitor connected between a second terminal of the first resistor and ground, there is provided an offset current cancel means for canceling an offset current of the capacitor generated by an ionizer in order to measure an electrification quantity of the measurement subject placed in an ionizer environment.