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Silica-based optical waveguide circuit and fabrication method thereof
Silica-based optical waveguide circuit and fabrication method thereof
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机译:硅基光波导电路及其制造方法
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摘要
A silica-based optical waveguide circuit serves to reduce the time required to production while allowing a spot size converting function to work sufficiently. In a silica-based optical waveguide circuit comprising an input/output waveguide core formed to be thicker than an waveguide core and a tapered portion for connecting the input/output waveguide core and the waveguide core, wherein the waveguide circuit further has a core layer at each side of the input/output waveguide core, a thickness T of the core layer at the side of the input/output waveguide core is smaller than the thickness H of the input/output waveguide core.
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