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Microelectronic fabrication production control method and system providing enhanced microelectronic fabrication facility utilization flexibility
Microelectronic fabrication production control method and system providing enhanced microelectronic fabrication facility utilization flexibility
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机译:提供增强的微电子制造设施利用灵活性的微电子制造生产控制方法和系统
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摘要
Within both a method for controlling microelectronic fabrication production and a system for controlling microelectronic fabrication production there is developed and evaluated for a plurality of microelectronic fabrication facilities a plurality of demand, allocation and output management plans prior to assigning and entering within at least one microelectronic fabrication facility a microelectronic fabrication order. The development and evaluation of the plurality of demand, allocation and output management plans provides for enhanced flexibility when assigning and entering the microelectronic fabrication order.
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