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Method of forming a film having enhanced reflow characteristics at low thermal budget
Method of forming a film having enhanced reflow characteristics at low thermal budget
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机译:在低热预算下形成具有增强的回流特性的膜的方法
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摘要
A method of forming a film having enhanced reflow characteristics at low thermal budget is disclosed, in which a surface layer of material is formed above a base layer of material, the surface layer having a lower melting point than the base layer. In this way, a composite film having two layers is created. After reflow, the surface layer can be removed using conventional methods.
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