Superior toughness and adhesive strength ceramic coating of titanium aluminum carbon nitride-amorphous carbon nanocomposite

摘要

A nanocomposite having titanium aluminum carbon nitride and amorphous carbon is disclosed, and the nanocomposite comprises a titanium aluminum carbon nitride grain of nanometer scale and an amorphous carbon matrix, wherein the titanium aluminum carbon nitride grain of nanometer scale is embedded into the amorphous carbon matrix. The method for coating the nanocomposite of titanium aluminum carbon nitride-amorphous carbon on a substrate comprises: depositing the substrate in a reaction chamber; and igniting plasma to clean and remove an oxide layer and adsorptive on the substrate; injecting a reaction gas. The reaction gas is activated and thermal decomposed by plasma to form the nanocomposite coating layer of titanium aluminum carbon nitride-amorphous carbon on the surface of the substrate.