Coordinate transformation system for semiconductor device, coordinate transformation method and coordinate transformation program

摘要

A coordinate transformation system includes: a layout display unit configured to obtain an arbitrary point in layout data of a semiconductor device as a coordinate value of an FBM physical coordinate system indicative of a physical position; a pattern defining unit configured to define the relationship between an FBM physical address and the FBM physical coordinates using a pattern tree obtained by combining an array pattern, defining lining direction, interval, and the number of components to be disposed at equal intervals, with a random pattern, defining the relationship between the FBM physical address as a coordinate system of FBM data indicative of an electric failure position obtained by a test process of the semiconductor device and the FBM physical coordinates in a one-to-one corresponding manner; and a program generating unit configured to generate a program to transform the FBM physical address into the FBM physical coordinates from the pattern defined.