Methods of microstructuring ferroelectric materials

摘要

A method of micro-structuring a surface of a sample of ferroelectric material, the method comprising: (a) taking a sample of ferroelectric material having a −z face which is to be etched; (b) illuminating the −z face with ultraviolet light to define illuminated and unilluminated parts of the surface; and (c) immersing the −z face in an etchant to selectively remove the unilluminated parts of the −z face at a greater rate than the illuminated parts. The method can be carried out using pulsed ultraviolet light to etch lithium niobate crystals cut for etching on the −z face, and may further be combined with ablation to produce multi-level surface structures.