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Method and apparatus for depth profile analysis by laser induced plasma spectros copy
Method and apparatus for depth profile analysis by laser induced plasma spectros copy
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机译:通过激光诱导等离子体光谱复制进行深度剖面分析的方法和设备
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摘要
In a method of spectrochemical depth-profile analysis of heterogeneous materials, a first burst of ablation laser pulses in a first beam is directed at a sample to form an ablation crater. A second single pulse or burst of laser pulses in a second beam having a smaller width than said first beam is then directed at the bottom of the crater so as to create a plasma that emits radiation representative of a component in the sample without a significant contribution from the walls of the ablation crater. The intensity of radiation from the plasma is measured and the concentration of the selected component is determined from the intensity of the radiation. The depth at which the measurement is taken is then evaluated and the above steps repeated to determined the evolution of concentration of said selected component as a function of depth.
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