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Method and apparatus for providing and controlling delivery of a web of polishing material
Method and apparatus for providing and controlling delivery of a web of polishing material
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机译:提供和控制抛光材料网的输送的方法和设备
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摘要
Generally, a method and apparatus for supporting a web of polishing material. In one embodiment, the apparatus includes a platen adapted to support the web, a frame assembly, and one or more flexures coupled between the platen and the frame assembly. The flexure allows the frame assembly to be moved in relation to the platen. When the frame assembly is in an extended position relative to the platen, the web is placed in a spaced-apart relation to the platen.
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