Data processing method and apparatus to determine killer ratio based on a variety of defect types

摘要

When a killer ratio resulting from a specified defect is calculated from die research data including the number of defects and manufacturing result pass/fail for each of a plurality of dies, the die research data is classified based on the number of the specified defects present on a die to calculate a killer ratio for each of a plurality of the classified groups, from which a killer ratio in the case of one specified defect is calculated for each of the groups. The killer ratio for each of the groups is weighted in accordance with the number of the specified defects to calculate one killer ratio as the average value of the weighted killer ratios, thereby calculating one killer ratio which reflects the effect of the number of the specified defects present on a die.