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System and method for metrology of surface flatness and surface nanotopology of materials
System and method for metrology of surface flatness and surface nanotopology of materials
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机译:材料表面平整度和表面纳米形貌的计量系统和方法
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摘要
A metrology system and method uses pulsed light to allow continuous movement of a target relative to the sensor. A metrology system and method uses dynamic adjustment of tilt in a system. A metrology system and method calibrates the system to remove inherent optical aberrations in the system. Filtering may also be used in the system to increase accuracy.
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