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Electron scatter in a thin membrane to eliminate detector saturation
Electron scatter in a thin membrane to eliminate detector saturation
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机译:电子散射在薄膜中以消除检测器饱和
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摘要
An electron beam system employs a non-saturating detector for measuring total beam current that comprises a thin membrane of only a few microns thickness placed before a detector and separated from the detector by a drift space of about 10 mm, so that electrons in the beam are not absorbed to any significant extent, but are scattered transversely to spread the beam and avoid local saturation of the detector.
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