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Microstructure array, and methods of fabricating a microstructure array, a mold for forming a microstructure array, and a microlens array
Microstructure array, and methods of fabricating a microstructure array, a mold for forming a microstructure array, and a microlens array
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机译:微结构阵列及其制造方法,用于形成微结构阵列的模具和微透镜阵列
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摘要
In a method for fabricating an array of microstructures, a substrate with an electrically-conductive portion is provided, an insulating mask layer is formed on the electrically-conductive portion of the substrate, a plurality of openings are formed in the insulating mask layer to expose the electrically-conductive portion, and a first plated or electrodeposited layer is deposited in the openings and on the insulating mask layer by electro- or electroless-plating, or electrodeposition. At least a surface of the first plated or electrodeposited layer is made electrically conductive. After that, the insulating mask layer is removed, and a second plated layer is formed on the first plated or electrodeposited layer and on the electrically-conductive portion by electroplating to firmly fix the first plated or electrodeposited layer to the substrate.
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