Aqueous alkaline (pH 10.8) slurries prepared from slurries with a particle size from 0.1-0.5 microns heated or autoclaved to increase abrasivity

摘要

Autoclaving slurries of porous, inorganic oxide particles results in an increased abrasiveness of the particles as reflected in increased removal rates of a polished substrate at standard polishing conditions in chemical mechanical polishing operations. The increase in particle abrasivity strongly correlates with a decrease in particle surface area as determined by N2 adsorption (BET method). As a result, methods for obtaining a desired abrasivity for a slurry can be practiced by heating a slurry of inorganic oxide particles to a BET surface area previously identified as associated with the abrasivity desired. The resulting slurries can be used in conventional polishing machinery. The method is particularly suitable for preparing silica-based abrasive slurries.