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POLARIMETRIC SYSTEM AND METHOD OF POLARIMETRIC MEASUREMENT OF THE REPRESENTATIVE PARAMETERS OF A SAMPLE
POLARIMETRIC SYSTEM AND METHOD OF POLARIMETRIC MEASUREMENT OF THE REPRESENTATIVE PARAMETERS OF A SAMPLE
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机译:样本表示参数的极化系统和极化测量方法
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摘要
The invention concerns a polarimetric system and a method of polarimetric measurement of the Mueller matrix coefficients of a sample (7). The polarimetric system contains an excitation section (1) emitting a light beam (2). Said light beam passes through a polarisation state generator (PSG)(5) and is focused on the sample (7) on a sample holder (3). After reflection on the sample surface (8), the beam goes through an analysis section (4) containing a polarisation state detector (PSD) or polarimeter (9) and detection means (10).;According to the invention, the light beam (2) emitted by the excitation section (1) is in the spectral range from the far ultraviolet to the visible. The light beam propagates through the excitation section (1) up to through the analysis section (4) under a low partial pressure of far ultraviolet absorbing gases. The polarimetric system comprises one or more air tight chambers (17), said chambers containing said excitation section, said analysis section and said sample holder.
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