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POLARIMETRIC SYSTEM AND METHOD OF POLARIMETRIC MEASUREMENT OF THE REPRESENTATIVE PARAMETERS OF A SAMPLE

机译:样本表示参数的极化系统和极化测量方法

摘要

The invention concerns a polarimetric system and a method of polarimetric measurement of the Mueller matrix coefficients of a sample (7). The polarimetric system contains an excitation section (1) emitting a light beam (2). Said light beam passes through a polarisation state generator (PSG)(5) and is focused on the sample (7) on a sample holder (3). After reflection on the sample surface (8), the beam goes through an analysis section (4) containing a polarisation state detector (PSD) or polarimeter (9) and detection means (10).;According to the invention, the light beam (2) emitted by the excitation section (1) is in the spectral range from the far ultraviolet to the visible. The light beam propagates through the excitation section (1) up to through the analysis section (4) under a low partial pressure of far ultraviolet absorbing gases. The polarimetric system comprises one or more air tight chambers (17), said chambers containing said excitation section, said analysis section and said sample holder.
机译:本发明涉及一种偏振系统和一种对样品(7)的穆勒矩阵系数进行偏振测量的方法。偏振系统包含发射光束(2)的激发部分(1)。所述光束通过偏振态发生器(PSG)(5),并聚焦在样品架(3)上的样品(7)上。在样品表面(8)上反射后,光束通过分析部分(4),该部分包含偏振状态检测器(PSD)或偏振计(9)和检测装置(10)。由激发部分(1)发射的2)在从远紫外线到可见光的光谱范围内。光束在远紫外线吸收气体的低分压下通过激发部分(1)传播到分析部分(4)。极化系统包括一个或多个气密室(17),所述室包含所述激发部分,所述分析部分和所述样品保持器。

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