POD LOAD INTERFACE EQUIPMENT ADAPTED FOR IMPLEMENTATION IN A FIMS SYSTEM

摘要

A box load interface implemented in a FIMS system includes a translation mechanism that actuates a port door attachable to the box door of a transport box to move the box door toward or away from the transport box to open or close it. A clamping mechanism clamps the transport box on a slidable tray controlled to move the transport box against and away from a port plate. An elevator assembly cooperates with the translation mechanism to move the port door after the box door has moved away from the transport box. The translation mechanism and elevator assembly may be integral. A differential optical scanning assembly detects positions of wafer specimens located in the transport box. A robot assembly removes and inserts wafer specimens from the transport box. A linear traveling assembly supports the robot assembly and travels along a lead screw driven by a lead nut mechanism.