METROLOGY SYSTEM WITH SPECTROSCOPIC ELLIPSOMETER AND PHOTOACOUSTIC MEASUREMENTS

摘要

An optical system includes both a microspot broadband spectroscopic ellipsometer (410) and a photoacoustic film thickness measurement system (415) that are supplied laser light by the same laser light source. One of the systems makes a measurement, the result of which is used to adjust a parameter of the other system; e.g. the ellipsometer (410) measures thickness and the photoacoustic system (415) uses the thickness result to measure the speed of the sound. In one version, the ellipsometer converts the laser beam to a broad-spectrum beam that provides higher intensity .