VOLATILE MAGNESIUM ALKYLALUMINUM ALKOXIDE AND DEPOSITION OF MAGNESIUM ALUMINATE FILM USING THE SAME

摘要

Novel magnesium dialkylaluminum alkoxide derivative represented by Mg[(ν-OR')2A1R2]2 wherein R and R' are each a C1-5 alkyl group and R is not the same as R', preferably magnesium dimethylaluminum isopropoxide, is easily prepared by reacting a trialkylaluminum with an alcohol or an aluminum trialkoxide to obtain a dialkylaluminum alkoxide; reacting the dialkylaluminium alkoxide with an alkali metal alkoxide to obtain an alkali metal dialkylaluminum alkoxide; and reacting the alkali metal dialkylaluminum alkoxide with a magnesium halide. The alkoxide derivative of the present invention can be vaporized at a low temperature, below 70 °C and, therefore, effectively employed in the CVD process of a magnesium aluminate film.