METHOD FOR PRODUCING A THREE-DIMENSIONAL PATTERN IN THE FUNCTIONAL LAYER OF AN ARTICLE

摘要

The invention relates to engineering fields which use micro and/or nanometric technologies. A three-dimensional pattern is produced in the functional layer of an article by jointly using multipass machining and laser treatment. The inventive method consists in producing a system of grooves and forming side faces and a boss which limit said grooves and in outlining them by cutting. Prior to outlining, bisecting groves directed away from the area adjacent to the contour line towards the area of the removing allowance and where the parts of the outline of the boss are connected are embodied. The allowance remaining after outlining is removed by means of laser processing in two stages: in the first stage, an additional groove which is equidistant to the already formed outline groove and which has a depth equal to the specified depth of the forming groove is embodied; in the second stage, the remaining allowance is removed with the aid of a laser beam scanning in the area limited by the additional groove in the first stage. During said stages, the laser beam focusing and scanning are carried out in such a way that it does not act on the part of the face of the limiting boss which is formed by the outlining.