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CLUSTER SIZE MEASUREMENT INSTRUMENT AND METHOD FOR CLUSTER ION BEAM DIAGNOSTIC
CLUSTER SIZE MEASUREMENT INSTRUMENT AND METHOD FOR CLUSTER ION BEAM DIAGNOSTIC
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机译:团簇离子束诊断的团簇尺寸测量仪器和方法
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摘要
A detector apparatus and its use for cluster ion beam diagnostics are described. The detector has a Faraday cup with a conductance path to a gas pressure detector and a conductance to the detector exit. The detector acquires ion current, which is a measure of the ion beam flux, and also acquires mass flux, through a pressure measurement. The pressure measurement responds to the mass of dissociated gas clusters and is combined with information about instantaneous ion current to estimate mean gas cluster ion size ({overscore (N)}i).
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